教員総覧 - 式田　光宏 | 広島市立大学

シキダ　ミツヒロ Shikida Mitsuhiro
式田　光宏

所属 Hiroshima City University Graduate School Graduate School of Information Sciences Major in Biomedical Information Sciences

Hiroshima City University Faculty of Information Sciences Department of Biomedical Information Sciences

職種 Professor

Book and thesis
著書	次世代マイクロニードルの開発と応用 (共著) 2022/12/26
著書	半導体製造におけるウェット／ドライエッチング技術 (共著) 2022/10
著書	ポリイミドの高機能設計と応用技術 (共著) 2022/08
著書	ドラッグデリバーシステム－バイオ医薬品創成に向けた組織、細胞内核送達技術の開発－ (共著) 2018/06/27
著書	Skin Permeation and Disposition of Therapeutic and Cosmeceutical Compounds (共著) 2017/12/15
著書	アクチュエータの新材料，駆動制御，最新応用技術 (共著) 2017/03
著書	マイクロニードルの製造と応用展開，監修：中川晋作 (共著) 2016/10
著書	内服・注射剤に代わる新規薬剤投与デバイスと簡便な投与経路の開発 (共著) 2014
著書	Biochemical Sensors: Mimicking Olfactory and Gustatory Senses (共著) 2013
著書	Micro-Nano Mechatronics (共著) 2013
著書	精密加工・微細構造形成のトラブル対策，応用事例集 (共著) 2013
著書	最先端メディカルエンジニアリング (共著) 2011
著書	次世代経皮吸収型製剤の開発と応用杉林堅次 (共著) 2011
著書	電子情報通信学会　知識ベース (共著) 2010
著書	MEMS/NEMS工学全集 (共著) 2009
著書	マイクロ・ナノデバイスのエッチング技術 (共著) 2009
著書	ウェットエッチングのメカニズムと処理パラメータの最適化 (共著) 2008
著書	ドライ・ウエットエッチング技術全集 (共著) 2008
著書	薄膜ハンドブック　第2版 (共著) 2008
著書	Comprehensive Microsystems (共著) 2007
著書	磁性ビーズのバイオ・環境技術への応用展開半田宏・阿部正紀・野田紘憙 (共著) 2006
著書	マイクロ化学チップの技術と応用北森武彦・庄子習一・馬場嘉信・藤田博之　編 (共著) 2004
論文	Non-Contact Sensor Module for Rapid Detection of Extravasation During Intravenous Drug Administration Biomedical Microdevices 26 (44) (共著) 2024/12
論文	Proof of Concept Quantitative Monitoring of Respiration Using Low-Energy Wearable Piezoelectric Thread Electronics 13 (23),4577 (共著) 2024/12
論文	歯石除去中の呼吸管理を可能とする流量センサ付き気管挿管チューブ電気学会論文誌E（センサ・マイクロマシン部門誌） 144 (12),390-395頁 (共著) 2024/12
論文	Investigation of Calibration Methodology Using Mouth Airflow for Wearable Sensor Toward Quantitative Respiration Monitoring IEEJ Transactions on Electrical and Electronic Engineering 19 (5),800-806頁 (共著) 2024/05
論文	Pitot Tube Sensor Probe System for Simultaneous Airflow and Pressure Measurement of Expiration Inside Pulmonary Airway IEEJ Transactions on Electrical and Electronic Engineering 19 (5),807-813頁 (共著) 2024/05
論文	Facile Packaging for Fiber-Shaped Flexible MEMS Thermal Accelerometer IEEE Sensors Letters 7 (11) (共著) 2023/11
論文	MEMS技術を用いた次世代経皮吸収製剤（薬剤投与デバイス） PHARMSTAGE 23 (6),64-69頁 (共著) 2023/09
論文	Facile In-Tube-Center Packaging of Flexible Airflow Rate Microsensor for Simultaneous Respiration and Heartbeat Measurement IEEE Sensors Journal 23 (12),12626-12633頁 (共著) 2023/06
論文	Analysis of airstream inside the slip joint of tracheal intubation tube for breathing measurement 143 (1),6-12頁 (共著) 2023/01
論文	Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor using Flexible Copper on Polyimide Substrate Micromachines 14 (1),42 (共著) 2023/01
論文	MEMS技術シリーズ(6) - システム - Yano E plus 176,90-94頁 (共著) 2022/11
論文	Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors Japanese Journal of Applied Physics 61 (SA0803) (共著) 2022/01
論文	Development of MEMS flow and pressure sensor device for detection of extravasation at an ultra-early stage IEEJ Transactions on Electrical and Electronic Engineering 18 (1),139-146頁 (共著) 2022/01
論文	Wireless stent flow sensor system evaluating breathing airflow in airway of experimental animals 電気学会論文誌E（センサ・マイクロマシン部門誌） 142 (1),2-7頁 (共著) 2022/01
論文	Development of sensor-probe system with function of measuring flow and pressure for evaluating breathing property at airway in lungs Microsystem Technologies 27 (10),3935-3942頁 (共著) 2021
論文	Development of spear-shaped microneedle and applicator for tip insertion into artificial skin Microsystem Technologies 27 (10),3907-3916頁 (共著) 2021
論文	Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat Journal of Micromechanics and Microengineering 31,025006 (8pp) (共著) 2021
論文	Miniaturization of respiratory measurement system in artificial ventilator for small animal experiments to reduce dead space and its application to lung elasticity evaluation Sensors 21,5123 (共著) 2021
論文	Catheter sensor system for in-situ breathing and optical imaging measurements at airway in inside of lung Microsystem Technologies 26 (12),3715-3724頁 (共著) 2020
論文	Development of micromachined flow sensor for drip infusion system Microsystem Technologies 26 (12),3677-3683頁 (共著) 2020
論文	Micro-machined respiratory monitoring system for artificial ventilator in animal experiments Microsystem Technologies 26 (12),3705-3713頁 (共著) 2020
論文	Monolithic integration of MEMS thermal flow sensor and its driving circuit onto flexible Cu on polyimide film Microsystem Technologies 26 (9),2839-2846頁 (共著) 2020
論文	A micro-machined flow sensor formed on copper on polyimide substrate and its application to respiration measurement Japanese Journal of Applied Physics 58 (SDDL07) (共著) 2019
論文	Body temperature measurement based on breathing airflow for continuously monitoring patient body condition in disaster Microsystem Technologies 25 (2),4313-4321頁 (共著) 2019
論文	Energy-less respiration monitoring device based on thermo-sensitive film Microsystem Technologies 26 (5),489-497頁 (共著) 2019
論文	Fabrication method with high-density, high-height microneedle using microindentation method for drug delivery system Microsystem Technologies 26 (8),765-773頁 (共著) 2019
論文	口元気流計測による乳幼児の呼吸心拍一括評価を目指した気管内挿管チューブ実装型流量センサシステムに関する研究電気学会論文誌E（センサ・マイクロマシン部門誌） 139 (7),186-194頁 (共著) 2019
論文	Analysis of measurement conditions for detecting change in vital signs with catheter flow sensor Journal of Micromechanics and Microengineering 28,105015 (12pp) (共著) 2018
論文	Catheter type thermal flow sensor with small footprint for measuring breathing function Microsystem Technologies 24 (8),3455-3465頁 (共著) 2018
論文	Development of tube flow sensor by using film transfer technology and its application to in-situ breathing and surface image evaluation in airways Microsystem Technologies 24 (8),3417-3424頁 (共著) 2018
論文	Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airway Microsystem Technologies 23 (12),5397-5406頁 (共著) 2017
論文	Development of implantable catheter flow sensor into inside of bronchi for laboratory animal Microsystem Technologies 23 (1),175-185頁 (共著) 2017
論文	Fabrication of flexible thermal MEMS device based on Cu on polyimide substrate and its flow sensor application Microsystem Technologies 23 (3),677-685頁 (共著) 2017
論文	Heartbeat signal detection from analysis of airflow in rat airway under different depths of anesthesia conditions IEEE Sensors Journal 17 (14),4369-4377頁 (共著) 2017
論文	Respiration and heartbeat signal detection from airflow at airway in rat by catheter flow sensor with tmeparature compensation function Journal of Micromechanics and Microengineering 27 (12) (共著) 2017
論文	Smooth-surfaced flexible wall shear stress sensor fabricating by film transfer technology Sensors and Actuators A 265,86-93頁 (共著) 2017
論文	Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor Microsystem Technologies 23 (8),3547-3558頁 (共著) 2017
論文	Design and fabrication of differently shaped pyramids on Si {100} by anisotropic wet etching Microsystem Technologies 22 (12),2801-2809頁 (共著) 2016
論文	Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy Microsystem Technologies 22 (6),1181-1188頁 (共著) 2016
論文	Effect of temperature and humidity on degradation of single crystal silicon microbeam in micro-resonator Sensors and Materials 28 (2),113-120頁 (共著) 2016
論文	Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM Microsystem Technologies 21,661-668頁 (共著) 2015
論文	Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer Microsystem Technologies 21,239-246頁 (共著) 2015
論文	Catheter flow sensor with temperature compensation for tracheal intubation tube system Sensors and Actuators A,155-160頁 (共著) 2014
論文	Droplet-based biochemical assay by magnetic wire manipulation between multiple droplets Microsystem Technologies 20,315-323頁 (共著) 2014
論文	Lateral-Deflection-Controlled Friction Force Microscopy Journal of Applied Physics 116,084311 (共著) 2014
論文	Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method Applied Physics Express 7,057101 (共著) 2014
論文	Measurement of Wall Shear Stress Fluctuation with the Micro-fabricated Hot-film sensor in a Boundary Layer of a Wall Jet Journal of Japanese Society for Experimental Mechanics 14,s13-s18頁 (共著) 2014
論文	Micromachined catheter flow sensor and its applications in breathing measurements in animal experiments Microsystem Technologies 20,505-513頁 (共著) 2014
論文	Micromachined pyramidal shaped biodegradable microneedle and its skin penetration capability Microsystem Technologies 20,2239-2245頁 (共著) 2014
論文	On the measurement of wall shear stress with a patch-type micro-fabricated hot-film sensor Journal of Fluid Science and Technology 9 (3),1-13頁 (共著) 2014
論文	Structural design of polymer-based tactile sensor with table-shaped sensing pad Microelectronic Engineering 127 (5),1-6頁 (共著) 2014
論文	呼気吸気計測を目的とした自己温度補償型カテーテル流量センサの開発電気学会論文誌E（センサ・マイクロマシン部門誌） 134 (6),126-131頁 (共著) 2014
論文	A flexible transparent touch panel based on ionic liquid channel IEEE Sensors 13,3490-3495頁 (共著) 2013
論文	A MEMS flow sensor applied in a variable-air-volume air-conditioning system unit in a building Sensors and Actuators A 189,212-217頁 (共著) 2013
論文	A Table-shaped tactile sensor for detecting triaxial force on the basis of strain distribution Sensors 13,16347-16359頁 (共著) 2013
論文	Design principle of micromechanical probe with an electrostatic actuator for friction force microscopy Microsystem Technologies 19,1567-1572頁 (共著) 2013
論文	Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems Appied Physics Letters 103-181901頁 (共著) 2013
論文	Measurement of Wall Shear Stress by Using Micro-fabricated Hot-film and Floating-element Sensors Journal of the Japanese Society for Experimental Mechanicas 13,s1-s6頁 (共著) 2013
論文	Mechanical strengthening of Si cantilevers by chemical wet etching Microsystem Technologies 19,547-553頁 (共著) 2013
論文	An electrostatic actuator for dual-axis micro-mechanical probe on friction force microscope Sensors and Actuators A 175,94-100頁 (共著) 2012
論文	Flexible flow sensor for large scale air-conditioning network systems Sensors and Actuators A 188,2-8頁 (共著) 2012
論文	Laser Ablation Propulsion Performance of Surface-Modified Polyacetal Journal of Propulsion and Power 28,840-847頁 (共著) 2012
論文	Measured viscous and dry friction forces in nanometer-thick lubricant film by friction force Microscopy with Micromechanical Probe TRIBOLOGY LETTERS 48,201-208頁 (共著) 2012
論文	Droplet introduction into pen-shaped portable reaction system by gravity and interfacial forces Micro & Nano Letters 6,253-256頁 (共著) 2011
論文	Fabrication of a pen-shaped portable biochemical reaction system based on magnetic bead manipulation Journal of Micromechnics and Microengineering 21-067006 (7pp)頁 (共著) 2011
論文	Fabrication of novel microstructures based on orientation dependent adsorption of surfactant molecules in TMAH solution Journal of Micromechnics and Microengineering 21-015008 (11pp)頁 (共著) 2011
論文	Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement Biomedical Microdevices 12,247-252頁 (共著) 2010
論文	Characteristics of an optimized catheter-type thermal flow sensor for measuring reciprocating airflows in bronchial pathways Journal of Micromechnics and Microengineering 20-125030 (11pp)頁 (共著) 2010
論文	Droplet-based gene expression analysis using a device with magnetic force-based-droplet-handling system J. Bioscience and Bioengineering 109,193-197頁 (共著) 2010
論文	Fabric tactile sensor composed of ball-shaped umbonal fiber for detcting normal and lateral force Micro & Nano Letters 5,211-214頁 (共著) 2010
論文	Fabrication of a Stent-type Thermal Flow Sensor for Measuring Nasal Respiration Journal of Micromechnics and Microengineering 20-055029 (8pp)頁 (共著) 2010
論文	Fabrication of monolithically integrated flow sensor on tube Sensors and Actuators A 163,61-67頁 (共著) 2010
論文	Large-sized fabric tactile sensor for detecting contacted object Micro & Nano Letters 5,389-392頁 (共著) 2010
論文	Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy Tribology Online 5,144-149頁 (共著) 2010
論文	Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining Journal of Micromechnics and Microengineering 20-065008 (9pp)頁 (共著) 2010
論文	The mechanism of selective corrugation removal by KOH anisotropic wet etching Journal of Micromechnics and Microengineering 20-015038 (9pp)頁 (共著) 2010
論文	A Catheter-type Flow Sensor for Measurement of Aspirated- and Inspired-air Characteristics in Bronchial Region Journal of Micromechnics and Microengineering 19-105027 (9pp)頁 (共著) 2009
論文	Agitation of Magnetic Beads by Multi-layered Flat Coils Sensors and Actuators: B 137,774-780頁 (共著) 2009
論文	Development of self vibration/detection AFM probe using quartz tuning fork IEEJ Transactions on Electrical and Electronic Engineering 4,378-385頁 (共著) 2009
論文	Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH Sensors and Actuators A 156,334-341頁 (共著) 2009
論文	Magnetic force-based Lab-on-a-chip for single cell analysis in a droplet ECS Transactions 16,15-20頁 (共著) 2009
論文	Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH Sensors and Actuators: A 154,192-203頁 (共著) 2009
論文	A Palmtop-sized Rotary-drive-type Biochemical Analysis System by Magnetic Beads Handling Journal of Micromechnics and Microengineering 18-035034 (8pp)頁 (共著) 2008
論文	Cell culture arrays using magnetic force-based cell patterning for dynamic single cell analysis Lab on a Chip 8,134-142頁 (共著) 2008
論文	Effect of temperature on fracture toughness in single-crystal-silicon film and transition in its fracture mode Journal of Micromechnics and Microengineering 18-015026 (7pp)頁 (共著) 2008
論文	Fabrication of a bubble driven arrayed actuator for a tactile display Journal of Micromechnics and Microengineering 18-065012 (9pp)頁 (共著) 2008
論文	Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber Journal of Micromechnics and Microengineering 18-085014 (8pp)頁 (共著) 2008
論文	Fabrication of Quartz Tuning-Fork probe with Sharp Tip for AFM Systems Sensors and Actuators: A 148,311-318頁 (共著) 2008
論文	Improved sensitivity of dual-axis micro-mechanical probe for friction force microscope Tribology Online 3,356-360頁 (共著) 2008
論文	Micromechanical characterization of electroplated permalloy films for MEMS Microsystems Technologies 14,131-134頁 (共著) 2008
論文	On-chip Polymerase Chain Reaction Microdevice Employing a Magnetic Droplet-Manipulation System Sensors & Actuators: B 130,583-588頁 (共著) 2008
論文	Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching ECS Transactions 16,133-140頁 (共著) 2008
論文	Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition Sensors & Actuators: A 138,87-96頁 (共著) 2007
論文	Effect of magnesium in KOH solution on the anisotropic wet etching of silicon Sensors & Actuators: A 134,465-470頁 (共著) 2007
論文	Experimental and theoretical study of an on-wall in-tube flexible thermal sensor Journal of Micromechnics and Microengineering 17,679-686頁 (共著) 2007
論文	Fabrication of densely arrayed Si needles with large height for transdermal drug delivery system application IEEJ Transactions on Electrical and Electronic Engineering 2,340-347頁 (共著) 2007
論文	Influence of sub-micrometer notches on the fracture of single crystal silicon thin films Fatigue & Fracture of Engineering Materials & Structures 30,1172-1181頁 (共著) 2007
論文	Mechanical design and force calibration of dual-axis micro-mechanical probe for friction force microscopy Journal of Applied Physics 101,034308-1-6 (共著) 2007
論文	Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants Journal of Micromechnics and Microengineering 17,2299-2307頁 (共著) 2007
論文	A Force Transmission System based on a Tulip-shaped Electrostatic Clutch for Haptic Display Devices Journal of Micromechnics and Microengineering 16,2673-2683頁 (共著) 2006
論文	An active tactile sensor for detecting mechanical characteristics of contacted objects Journal of Micromechnics and Microengineering 16,1625-1632頁 (共著) 2006
論文	Characterization of anisotropic wet etching properties of single crystal silicon: Effects of ppb-level of Cu and Pb in KOH solution Sensors & Actuators: A 128,125-131頁 (共著) 2006
論文	Development of an enzymatic reaction device using magnetic beads-cluster handling Journal of Micromechnics and Microengineering 16,1875-1883頁 (共著) 2006
論文	Dual-axis micro-mechanical probe for independent detection of lateral and vertical forces Applied Physics Letters 89,173120 (共著) 2006
論文	Fabrication of a Hollow Needle Structure by Dicing, Wet Etching, and Metal Deposition Journal of Micromechnics and Microengineering 16,2230-2239頁 (共著) 2006
論文	Fabrication of densely arrayed micro-needles with flow channels by mechanical dicing and anisotropic wet etching Journal of Micromechnics and Microengineering 16,1740-1747頁 (共著) 2006
論文	Improvement in smoothness of anisotropically etched silicon surface: Effects of surfactant and TMAH concentration Sensors & Actuators: A 125,415-421頁 (共著) 2006
論文	Mechanical properties of a micron-sized SCS film in a high-temperature environment Journal of Micromechnics and Microengineering 16,715-720頁 (共著) 2006
論文	Proposal of pumpless, valveless, and flowless miniaturized reactor using magnetic beads for the portable analysis device Journal of Chemical Engineering of Japan 39,1296-1299頁 (共著) 2006
論文	Using Wettability and Interfacial Tension to Handle Droplets of Magnetic Beads in a Micro-Chemical-Analysis System Sensors & Actuators: B 113,563-569頁 (共著) 2006
論文	摩擦力・加重の独立測定可能な摩擦力顕微鏡用マイクロプローブ機械学会論文誌C編 72,3655-3664頁 (共著) 2006
論文	Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition Sensors & Actuators: A 117,143-150頁 (共著) 2005
論文	Anisotropy of Fracture Strength and Fracture Toughness of Micro-sized Single-crystal Silicon The Transactions of The Institute of Electrical Engineers of Japan 125,307-312頁 (共著) 2005
論文	Characterization of orientation-dependent etching properties of quartz: Application to 3-D micromachining simulation system Sensors & Materials 17,179-186頁 (共著) 2005
論文	Fracture toughness measurement of thin-film silicon Fatigue & Fracture of Engineering Materials & Structures 28,687-694頁 (共著) 2005
論文	Measurement for fracture toughness of single crystal silicon film with tensile test Sensors & Actuators: A 119,229-235頁 (共著) 2005
論文	Polyimide film micromachining by wet-etching technology The Transactions of The Institute of Electrical Engineers of Japan 125,27-36頁 (共著) 2005
論文	Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications Journal of Micromechnics and Microengineering 15,282-289頁 (共著) 2005
論文	A micromachined active tactile sensor for hardness detection Sensors & Actuators: A 114,141-146頁 (共著) 2004
論文	Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution Sensors & Actuators: A 114,516-520頁 (共著) 2004
論文	Non-Photolithographic Pattern Transfer for Fabricating Arrayed 3-D Microstructures by Chemical Anisotropic Etching Sensors & Actuators: A 116,264-271頁 (共著) 2004
論文	Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures Journal of Micromechnics and Microengineering 14,1462-1467頁 (共著) 2004
論文	Three-dimensional interconnect technology on a flexible polyimide film Journal of Micromechnics and Microengineering 14,38-48頁 (共著) 2004
論文	Through-wafer interconnection technology for silicon Journal of Micromechnics and Microengineering 14,1029-1036頁 (共著) 2004
論文	Difference in activated atomic steps on (111) silicon surface during KOH and TMAH etching Sensors & Materials 15,93-99頁 (共著) 2003
論文	Effect of ppb-level metal impurities in KOH solution on the etching of Si {110} and {100} Sensors & Materials 15,43-51頁 (共著) 2003
論文	Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon Sensors & Materials 15,21-35頁 (共著) 2003
論文	A model explaining mask-corner undercut phenomena in anisotropic silicon etching: A saddle point in the etching-rate diagram Sensors & Actuators: A 97-98,758-763頁 (共著) 2002
論文	Active tactile sensor for detecting contact force and hardness of an object Sensors & Actuators: A 103,213-218頁 (共著) 2002
論文	Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors Sensors & Actuators: A 100,114-122頁 (共著) 2002
論文	Tensile testing system for sub-micrometer thick films Sensors & Actuators: A 97-98,492-496頁 (共著) 2002
論文	Change in orientation-dependent etching properties of single-crystal silicon caused by a surfactant added to TMAH solution Sensors and Materials 13,285-291頁 (共著) 2001
論文	Micro-morphology of single crystalline silicon surface during anisotropic wet chemical etching in KOH: velocity source forests Sensors & Actuators: A 93,219-231頁 (共著) 2001
論文	Micro-morphology of single crystalline silicon surface during anisotropic wet in KOH and TMAH Sensors & Actuators: A 93,232-242頁 (共著) 2001
論文	Microfabricated silicon dioxide cantilever with subwavelength aperture Journal of Microscopy 202,12-15頁 (共著) 2001
論文	Patterning of polyamide and metal in deep trench Sensors & Actuators: A 92,208-213頁 (共著) 2001
論文	Surface roughness of single-crystal silicon etched by TMAH solution Sensors & Actuators: A 90,223-231頁 (共著) 2001
論文	Tensile-mode fatigue testing of silicon film as structural materials for MEMS Sensors & Actuators: A 93,70-75頁 (共著) 2001
論文	Development of an orientation-dependent anisotropic etching simulation system MICROCAD Electronics and Communications in Japan 83,13-22頁 (共著) 2000
論文	Differences in anisotropic etching properties of KOH and TMAH Sensors & Actuators: A 80,179-188頁 (共著) 2000
論文	Surface morphology of anisotropically etched single-crystal silicon Journal of Micromechnics and Microengineering 10,522-527頁 (共著) 2000
論文	Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip Sensors & Actuators: A 82,291-296頁 (共著) 2000
論文	薄膜材料を対象とするオンチップ引張疲労試験システムの開発精密工学会誌 66,1890-1894頁 (共著) 2000
論文	Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation Sensors & Actuators: A 73,131-137頁 (共著) 1999
論文	Roughening of single-crystal silicon surface etched by KOH water solution Sensors & Actuators: A 73,122-130頁 (共著) 1999
論文	オンチップ引張試験によるシリコン薄膜の応力とひずみの測定電気学会論文誌E 119,67-72頁 (共著) 1999
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