Book and thesis
Books
Skin Permeation and Disposition of Therapeutic and Cosmeceutical Compounds (Co-authored) 2017/12/15
Books
Biochemical Sensors: Mimicking Olfactory and Gustatory Senses (Co-authored) 2013
Books
Micro-Nano Mechatronics (Co-authored) 2013
Books
Comprehensive Microsystems (Co-authored) 2007
Papers
Analysis of airstream inside the slip joint of tracheal intubation tube for breathing measurement 143 (1),pp.6-12 (Co-authored) 2023
Papers
Fabrication of MEMS flow sensor using Cu on Polyimide substrate with integrated electrical wiring, tube structure, and the sensing element placed at the center of the tube Micromachines 14,pp.42 (Co-authored) 2023
Papers
Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors Japanese Journal of Applied Physics 61 (SA0803) (Co-authored) 2022
Papers
Development of MEMS flow and pressure sensor device for detection of extravasation at an ultra-early stage IEEJ Transactions on Electrical and Electronic Engineering 18 (1),pp.139-146 (Co-authored) 2022
Papers
Development of sensor-probe system with function of measuring flow and pressure for evaluating breathing property at airway in lungs Microsystem Technologies 27 (10),pp.3935-3942 (Co-authored) 2021
Papers
Development of spear-shaped microneedle and applicator for tip insertion into artificial skin Microsystem Technologies 27 (10),pp.3907-3916 (Co-authored) 2021
Papers
Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat Journal of Micromechanics and Microengineering 31,pp.025006 (8pp) (Co-authored) 2021
Papers
Miniaturization of respiratory measurement system in artificial ventilator for small animal experiments to reduce dead space and its application to lung elasticity evaluation Sensors 21,pp.5123 (Co-authored) 2021
Papers
Catheter sensor system for in-situ breathing and optical imaging measurements at airway in inside of lung Microsystem Technologies 26 (12),pp.3715-3724 (Co-authored) 2020
Papers
Development of micromachined flow sensor for drip infusion system Microsystem Technologies 26 (12),pp.3677-3683 (Co-authored) 2020
Papers
Micro-machined respiratory monitoring system for artificial ventilator in animal experiments Microsystem Technologies 26 (12),pp.3705-3713 (Co-authored) 2020
Papers
Monolithic integration of MEMS thermal flow sensor and its driving circuit onto flexible Cu on polyimide film Microsystem Technologies 26 (9),pp.2839-2846 (Co-authored) 2020
Papers
A micro-machined flow sensor formed on copper on polyimide substrate and its application to respiration measurement Japanese Journal of Applied Physics 58 (SDDL07) (Co-authored) 2019
Papers
Body temperature measurement based on breathing airflow for continuously monitoring patient body condition in disaster Microsystem Technologies 25 (2),pp.4313-4321 (Co-authored) 2019
Papers
Energy-less respiration monitoring device based on thermo-sensitive film Microsystem Technologies 26 (5),pp.489-497 (Co-authored) 2019
Papers
Fabrication method with high-density, high-height microneedle using microindentation method for drug delivery system Microsystem Technologies 26 (8),pp.765-773 (Co-authored) 2019
Papers
Analysis of measurement conditions for detecting change in vital signs with catheter flow sensor Journal of Micromechanics and Microengineering 28,pp.105015 (12pp) (Co-authored) 2018
Papers
Catheter type thermal flow sensor with small footprint for measuring breathing function Microsystem Technologies 24 (8),pp.3455-3465 (Co-authored) 2018
Papers
Development of tube flow sensor by using film transfer technology and its application to in-situ breathing and surface image evaluation in airways Microsystem Technologies 24 (8),pp.3417-3424 (Co-authored) 2018
Papers
Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airway Microsystem Technologies 23 (12),pp.5397-5406 (Co-authored) 2017
Papers
Development of implantable catheter flow sensor into inside of bronchi for laboratory animal Microsystem Technologies 23 (1),pp.175-185 (Co-authored) 2017
Papers
Fabrication of flexible thermal MEMS device based on Cu on polyimide substrate and its flow sensor application Microsystem Technologies 23 (3),pp.677-685 (Co-authored) 2017
Papers
Heartbeat signal detection from analysis of airflow in rat airway under different depths of anesthesia conditions IEEE Sensors Journal 17 (14),pp.4369-4377 (Co-authored) 2017
Papers
Respiration and heartbeat signal detection from airflow at airway in rat by catheter flow sensor with tmeparature compensation function Journal of Micromechanics and Microengineering 27 (12) (Co-authored) 2017
Papers
Smooth-surfaced flexible wall shear stress sensor fabricating by film transfer technology Sensors and Actuators A 265,pp.86-93 (Co-authored) 2017
Papers
Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor Microsystem Technologies 23 (8),pp.3547-3558 (Co-authored) 2017
Papers
Design and fabrication of differently shaped pyramids on Si {100} by anisotropic wet etching Microsystem Technologies 22 (12),pp.2801-2809 (Co-authored) 2016
Papers
Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy Microsystem Technologies 22 (6),pp.1181-1188 (Co-authored) 2016
Papers
Effect of temperature and humidity on degradation of single crystal silicon microbeam in micro-resonator Sensors and Materials 28 (2),pp.113-120 (Co-authored) 2016
Papers
Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM Microsystem Technologies 21,pp.661-668 (Co-authored) 2015
Papers
Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer Microsystem Technologies 21,pp.239-246 (Co-authored) 2015
Papers
Catheter flow sensor with temperature compensation for tracheal intubation tube system Sensors and Actuators A,pp.155-160 (Co-authored) 2014
Papers
Droplet-based biochemical assay by magnetic wire manipulation between multiple droplets Microsystem Technologies 20,pp.315-323 (Co-authored) 2014
Papers
Lateral-Deflection-Controlled Friction Force Microscopy Journal of Applied Physics 116,pp.084311 (Co-authored) 2014
Papers
Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method Applied Physics Express 7,pp.057101 (Co-authored) 2014
Papers
Measurement of Wall Shear Stress Fluctuation with the Micro-fabricated Hot-film sensor in a Boundary Layer of a Wall Jet Journal of Japanese Society for Experimental Mechanics 14,pp.s13-s18 (Co-authored) 2014
Papers
Micromachined catheter flow sensor and its applications in breathing measurements in animal experiments Microsystem Technologies 20,pp.505-513 (Co-authored) 2014
Papers
Micromachined pyramidal shaped biodegradable microneedle and its skin penetration capability Microsystem Technologies 20,pp.2239-2245 (Co-authored) 2014
Papers
On the measurement of wall shear stress with a patch-type micro-fabricated hot-film sensor Journal of Fluid Science and Technology 9 (3),pp.1-13 (Co-authored) 2014
Papers
Structural design of polymer-based tactile sensor with table-shaped sensing pad Microelectronic Engineering 127 (5),pp.1-6 (Co-authored) 2014
Papers
A flexible transparent touch panel based on ionic liquid channel IEEE Sensors 13,pp.3490-3495 (Co-authored) 2013
Papers
A MEMS flow sensor applied in a variable-air-volume air-conditioning system unit in a building Sensors and Actuators A 189,pp.212-217 (Co-authored) 2013
Papers
A Table-shaped tactile sensor for detecting triaxial force on the basis of strain distribution Sensors 13,pp.16347-16359 (Co-authored) 2013
Papers
Design principle of micromechanical probe with an electrostatic actuator for friction force microscopy Microsystem Technologies 19,pp.1567-1572 (Co-authored) 2013
Papers
Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems Appied Physics Letters 103-181901 (Co-authored) 2013
Papers
Measurement of Wall Shear Stress by Using Micro-fabricated Hot-film and Floating-element Sensors Journal of the Japanese Society for Experimental Mechanicas 13,pp.s1-s6 (Co-authored) 2013
Papers
Mechanical strengthening of Si cantilevers by chemical wet etching Microsystem Technologies 19,pp.547-553 (Co-authored) 2013
Papers
An electrostatic actuator for dual-axis micro-mechanical probe on friction force microscope Sensors and Actuators A 175,pp.94-100 (Co-authored) 2012
Papers
Flexible flow sensor for large scale air-conditioning network systems Sensors and Actuators A 188,pp.2-8 (Co-authored) 2012
Papers
Laser Ablation Propulsion Performance of Surface-Modified Polyacetal Journal of Propulsion and Power 28,pp.840-847 (Co-authored) 2012
Papers
Measured viscous and dry friction forces in nanometer-thick lubricant film by friction force Microscopy with Micromechanical Probe TRIBOLOGY LETTERS 48,pp.201-208 (Co-authored) 2012
Papers
Droplet introduction into pen-shaped portable reaction system by gravity and interfacial forces Micro & Nano Letters 6,pp.253-256 (Co-authored) 2011
Papers
Fabrication of a pen-shaped portable biochemical reaction system based on magnetic bead manipulation Journal of Micromechnics and Microengineering 21-067006 (7pp) (Co-authored) 2011
Papers
Fabrication of novel microstructures based on orientation dependent adsorption of surfactant molecules in TMAH solution Journal of Micromechnics and Microengineering 21-015008 (11pp) (Co-authored) 2011
Papers
Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement Biomedical Microdevices 12,pp.247-252 (Co-authored) 2010
Papers
Characteristics of an optimized catheter-type thermal flow sensor for measuring reciprocating airflows in bronchial pathways Journal of Micromechnics and Microengineering 20-125030 (11pp) (Co-authored) 2010
Papers
Droplet-based gene expression analysis using a device with magnetic force-based-droplet-handling system J. Bioscience and Bioengineering 109,pp.193-197 (Co-authored) 2010
Papers
Fabric tactile sensor composed of ball-shaped umbonal fiber for detcting normal and lateral force Micro & Nano Letters 5,pp.211-214 (Co-authored) 2010
Papers
Fabrication of a Stent-type Thermal Flow Sensor for Measuring Nasal Respiration Journal of Micromechnics and Microengineering 20-055029 (8pp) (Co-authored) 2010
Papers
Fabrication of monolithically integrated flow sensor on tube Sensors and Actuators A 163,pp.61-67 (Co-authored) 2010
Papers
Large-sized fabric tactile sensor for detecting contacted object Micro & Nano Letters 5,pp.389-392 (Co-authored) 2010
Papers
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy Tribology Online 5,pp.144-149 (Co-authored) 2010
Papers
Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining Journal of Micromechnics and Microengineering 20-065008 (9pp) (Co-authored) 2010
Papers
The mechanism of selective corrugation removal by KOH anisotropic wet etching Journal of Micromechnics and Microengineering 20-015038 (9pp) (Co-authored) 2010
Papers
A Catheter-type Flow Sensor for Measurement of Aspirated- and Inspired-air Characteristics in Bronchial Region Journal of Micromechnics and Microengineering 19-105027 (9pp) (Co-authored) 2009
Papers
Agitation of Magnetic Beads by Multi-layered Flat Coils Sensors and Actuators: B 137,pp.774-780 (Co-authored) 2009
Papers
Development of self vibration/detection AFM probe using quartz tuning fork IEEJ Transactions on Electrical and Electronic Engineering 4,pp.378-385 (Co-authored) 2009
Papers
Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH Sensors and Actuators A 156,pp.334-341 (Co-authored) 2009
Papers
Magnetic force-based Lab-on-a-chip for single cell analysis in a droplet ECS Transactions 16,pp.15-20 (Co-authored) 2009
Papers
Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH Sensors and Actuators: A 154,pp.192-203 (Co-authored) 2009
Papers
A Palmtop-sized Rotary-drive-type Biochemical Analysis System by Magnetic Beads Handling Journal of Micromechnics and Microengineering 18-035034 (8pp) (Co-authored) 2008
Papers
Cell culture arrays using magnetic force-based cell patterning for dynamic single cell analysis Lab on a Chip 8,pp.134-142 (Co-authored) 2008
Papers
Effect of temperature on fracture toughness in single-crystal-silicon film and transition in its fracture mode Journal of Micromechnics and Microengineering 18-015026 (7pp) (Co-authored) 2008
Papers
Fabrication of a bubble driven arrayed actuator for a tactile display Journal of Micromechnics and Microengineering 18-065012 (9pp) (Co-authored) 2008
Papers
Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber Journal of Micromechnics and Microengineering 18-085014 (8pp) (Co-authored) 2008
Papers
Fabrication of Quartz Tuning-Fork probe with Sharp Tip for AFM Systems Sensors and Actuators: A 148,pp.311-318 (Co-authored) 2008
Papers
Improved sensitivity of dual-axis micro-mechanical probe for friction force microscope Tribology Online 3,pp.356-360 (Co-authored) 2008
Papers
Micromechanical characterization of electroplated permalloy films for MEMS Microsystems Technologies 14,pp.131-134 (Co-authored) 2008
Papers
On-chip Polymerase Chain Reaction Microdevice Employing a Magnetic Droplet-Manipulation System Sensors & Actuators: B 130,pp.583-588 (Co-authored) 2008
Papers
Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching ECS Transactions 16,pp.133-140 (Co-authored) 2008
Papers
Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition Sensors & Actuators: A 138,pp.87-96 (Co-authored) 2007
Papers
Effect of magnesium in KOH solution on the anisotropic wet etching of silicon Sensors & Actuators: A 134,pp.465-470 (Co-authored) 2007
Papers
Experimental and theoretical study of an on-wall in-tube flexible thermal sensor Journal of Micromechnics and Microengineering 17,pp.679-686 (Co-authored) 2007
Papers
Fabrication of densely arrayed Si needles with large height for transdermal drug delivery system application IEEJ Transactions on Electrical and Electronic Engineering 2,pp.340-347 (Co-authored) 2007
Papers
Influence of sub-micrometer notches on the fracture of single crystal silicon thin films Fatigue & Fracture of Engineering Materials & Structures 30,pp.1172-1181 (Co-authored) 2007
Papers
Mechanical design and force calibration of dual-axis micro-mechanical probe for friction force microscopy Journal of Applied Physics 101,pp.034308-1-6 (Co-authored) 2007
Papers
Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants Journal of Micromechnics and Microengineering 17,pp.2299-2307 (Co-authored) 2007
Papers
A Force Transmission System based on a Tulip-shaped Electrostatic Clutch for Haptic Display Devices Journal of Micromechnics and Microengineering 16,pp.2673-2683 (Co-authored) 2006
Papers
An active tactile sensor for detecting mechanical characteristics of contacted objects Journal of Micromechnics and Microengineering 16,pp.1625-1632 (Co-authored) 2006
Papers
Characterization of anisotropic wet etching properties of single crystal silicon: Effects of ppb-level of Cu and Pb in KOH solution Sensors & Actuators: A 128,pp.125-131 (Co-authored) 2006
Papers
Development of an enzymatic reaction device using magnetic beads-cluster handling Journal of Micromechnics and Microengineering 16,pp.1875-1883 (Co-authored) 2006
Papers
Dual-axis micro-mechanical probe for independent detection of lateral and vertical forces Applied Physics Letters 89,pp.173120 (Co-authored) 2006
Papers
Fabrication of a Hollow Needle Structure by Dicing, Wet Etching, and Metal Deposition Journal of Micromechnics and Microengineering 16,pp.2230-2239 (Co-authored) 2006
Papers
Fabrication of densely arrayed micro-needles with flow channels by mechanical dicing and anisotropic wet etching Journal of Micromechnics and Microengineering 16,pp.1740-1747 (Co-authored) 2006
Papers
Improvement in smoothness of anisotropically etched silicon surface: Effects of surfactant and TMAH concentration Sensors & Actuators: A 125,pp.415-421 (Co-authored) 2006
Papers
Mechanical properties of a micron-sized SCS film in a high-temperature environment Journal of Micromechnics and Microengineering 16,pp.715-720 (Co-authored) 2006
Papers
Proposal of pumpless, valveless, and flowless miniaturized reactor using magnetic beads for the portable analysis device Journal of Chemical Engineering of Japan 39,pp.1296-1299 (Co-authored) 2006
Papers
Using Wettability and Interfacial Tension to Handle Droplets of Magnetic Beads in a Micro-Chemical-Analysis System Sensors & Actuators: B 113,pp.563-569 (Co-authored) 2006
Papers
Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition Sensors & Actuators: A 117,pp.143-150 (Co-authored) 2005
Papers
Anisotropy of Fracture Strength and Fracture Toughness of Micro-sized Single-crystal Silicon The Transactions of The Institute of Electrical Engineers of Japan 125,pp.307-312 (Co-authored) 2005
Papers
Characterization of orientation-dependent etching properties of quartz: Application to 3-D micromachining simulation system Sensors & Materials 17,pp.179-186 (Co-authored) 2005
Papers
Fracture toughness measurement of thin-film silicon Fatigue & Fracture of Engineering Materials & Structures 28,pp.687-694 (Co-authored) 2005
Papers
Measurement for fracture toughness of single crystal silicon film with tensile test Sensors & Actuators: A 119,pp.229-235 (Co-authored) 2005
Papers
Polyimide film micromachining by wet-etching technology The Transactions of The Institute of Electrical Engineers of Japan 125,pp.27-36 (Co-authored) 2005
Papers
Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications Journal of Micromechnics and Microengineering 15,pp.282-289 (Co-authored) 2005
Papers
A micromachined active tactile sensor for hardness detection Sensors & Actuators: A 114,pp.141-146 (Co-authored) 2004
Papers
Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution Sensors & Actuators: A 114,pp.516-520 (Co-authored) 2004
Papers
Non-Photolithographic Pattern Transfer for Fabricating Arrayed 3-D Microstructures by Chemical Anisotropic Etching Sensors & Actuators: A 116,pp.264-271 (Co-authored) 2004
Papers
Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures Journal of Micromechnics and Microengineering 14,pp.1462-1467 (Co-authored) 2004
Papers
Three-dimensional interconnect technology on a flexible polyimide film Journal of Micromechnics and Microengineering 14,pp.38-48 (Co-authored) 2004
Papers
Through-wafer interconnection technology for silicon Journal of Micromechnics and Microengineering 14,pp.1029-1036 (Co-authored) 2004
Papers
Difference in activated atomic steps on (111) silicon surface during KOH and TMAH etching Sensors & Materials 15,pp.93-99 (Co-authored) 2003
Papers
Effect of ppb-level metal impurities in KOH solution on the etching of Si {110} and {100} Sensors & Materials 15,pp.43-51 (Co-authored) 2003
Papers
Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon Sensors & Materials 15,pp.21-35 (Co-authored) 2003
Papers
A model explaining mask-corner undercut phenomena in anisotropic silicon etching: A saddle point in the etching-rate diagram Sensors & Actuators: A 97-98,pp.758-763 (Co-authored) 2002
Papers
Active tactile sensor for detecting contact force and hardness of an object Sensors & Actuators: A 103,pp.213-218 (Co-authored) 2002
Papers
Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors Sensors & Actuators: A 100,pp.114-122 (Co-authored) 2002
Papers
Tensile testing system for sub-micrometer thick films Sensors & Actuators: A 97-98,pp.492-496 (Co-authored) 2002
Papers
Change in orientation-dependent etching properties of single-crystal silicon caused by a surfactant added to TMAH solution Sensors and Materials 13,pp.285-291 (Co-authored) 2001
Papers
Micro-morphology of single crystalline silicon surface during anisotropic wet chemical etching in KOH: velocity source forests Sensors & Actuators: A 93,pp.219-231 (Co-authored) 2001
Papers
Micro-morphology of single crystalline silicon surface during anisotropic wet in KOH and TMAH Sensors & Actuators: A 93,pp.232-242 (Co-authored) 2001
Papers
Microfabricated silicon dioxide cantilever with subwavelength aperture Journal of Microscopy 202,pp.12-15 (Co-authored) 2001
Papers
Patterning of polyamide and metal in deep trench Sensors & Actuators: A 92,pp.208-213 (Co-authored) 2001
Papers
Surface roughness of single-crystal silicon etched by TMAH solution Sensors & Actuators: A 90,pp.223-231 (Co-authored) 2001
Papers
Tensile-mode fatigue testing of silicon film as structural materials for MEMS Sensors & Actuators: A 93,pp.70-75 (Co-authored) 2001
Papers
Development of an orientation-dependent anisotropic etching simulation system MICROCAD Electronics and Communications in Japan 83,pp.13-22 (Co-authored) 2000
Papers
Differences in anisotropic etching properties of KOH and TMAH Sensors & Actuators: A 80,pp.179-188 (Co-authored) 2000
Papers
Surface morphology of anisotropically etched single-crystal silicon Journal of Micromechnics and Microengineering 10,pp.522-527 (Co-authored) 2000
Papers
Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip Sensors & Actuators: A 82,pp.291-296 (Co-authored) 2000
Papers
Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation Sensors & Actuators: A 73,pp.131-137 (Co-authored) 1999
Papers
Roughening of single-crystal silicon surface etched by KOH water solution Sensors & Actuators: A 73,pp.122-130 (Co-authored) 1999
Papers
Characterization of orientation dependent etching properties of single-crystal silicon: Effect of KOH concentration Sensors & Actuators: A 64,pp.87-93 (Co-authored) 1998
Papers
Tensile-testing of silicon film having different crystallographic orientations carried out on a silicon chip Sensors & Actuators: A 70,pp.148-152 (Co-authored) 1998
Papers
Fabrication of an S-shaped microactuator IEEE/ASME Journal of Microelectro-mechanical Systems 6,pp.18-24 1997
Papers
Operation of an S-shaped film actuator in liquid environmentconcentration The Transactions of The Institute of Electrical Engineers of Japan 117-E,pp.227-231 (Co-authored) 1997
Papers
An electrostatic gas valve that works in higher than atmospheric gas pressure The Transactions of The Institute of Electrical Engineers of Japan 116-E,pp.219-224 (Co-authored) 1996
Papers
An electrostatically actuated gas valve with an S-shaped film element Journal of Micromechnics and Microengineering 4,pp.205-209 (Co-authored) 1994
Papers
Electrostatically driven gas valve with high conductance IEEE/ASME Journal of Microelectro-mechanical Systems 3,pp.76-80 (Co-authored) 1994
Papers
Orientation and transformation of flagella in electrostatic field IEEE Transactions on Industry Applications 28,pp.1194-1202 (Co-authored) 1992