Book and thesis
Books
Skin Permeation and Disposition of Therapeutic and Cosmeceutical Compounds (Co-authored) 2017/12/15
Books
Biochemical Sensors: Mimicking Olfactory and Gustatory Senses (Co-authored) 2013
Books
Micro-Nano Mechatronics (Co-authored) 2013
Books
Comprehensive Microsystems (Co-authored) 2007
Papers
Non-Contact Sensor Module for Rapid Detection of Extravasation During Intravenous Drug Administration Biomedical Microdevices 26 (44) (Co-authored) 2024/12
Papers
Proof of Concept Quantitative Monitoring of Respiration Using Low-Energy Wearable Piezoelectric Thread Electronics 13 (23),pp.4577 (Co-authored) 2024/12
Papers
Investigation of Calibration Methodology Using Mouth Airflow for Wearable Sensor Toward Quantitative Respiration Monitoring IEEJ Transactions on Electrical and Electronic Engineering 19 (5),pp.800-806 (Co-authored) 2024/05
Papers
Pitot Tube Sensor Probe System for Simultaneous Airflow and Pressure Measurement of Expiration Inside Pulmonary Airway IEEJ Transactions on Electrical and Electronic Engineering 19 (5),pp.807-813 (Co-authored) 2024/05
Papers
Facile Packaging for Fiber-Shaped Flexible MEMS Thermal Accelerometer IEEE Sensors Letters 7 (11) (Co-authored) 2023/11
Papers
Facile In-Tube-Center Packaging of Flexible Airflow Rate Microsensor for Simultaneous Respiration and Heartbeat Measurement IEEE Sensors Journal 23 (12),pp.12626-12633 (Co-authored) 2023/06
Papers
Analysis of airstream inside the slip joint of tracheal intubation tube for breathing measurement 143 (1),pp.6-12 (Co-authored) 2023/01
Papers
Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor using Flexible Copper on Polyimide Substrate Micromachines 14 (1),pp.42 (Co-authored) 2023/01
Papers
Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors Japanese Journal of Applied Physics 61 (SA0803) (Co-authored) 2022/01
Papers
Development of MEMS flow and pressure sensor device for detection of extravasation at an ultra-early stage IEEJ Transactions on Electrical and Electronic Engineering 18 (1),pp.139-146 (Co-authored) 2022/01
Papers
Wireless stent flow sensor system evaluating breathing airflow in airway of experimental animals 電気学会論文誌E（センサ・マイクロマシン部門誌） 142 (1),pp.2-7 (Co-authored) 2022/01
Papers
Development of sensor-probe system with function of measuring flow and pressure for evaluating breathing property at airway in lungs Microsystem Technologies 27 (10),pp.3935-3942 (Co-authored) 2021
Papers
Development of spear-shaped microneedle and applicator for tip insertion into artificial skin Microsystem Technologies 27 (10),pp.3907-3916 (Co-authored) 2021
Papers
Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat Journal of Micromechanics and Microengineering 31,pp.025006 (8pp) (Co-authored) 2021
Papers
Miniaturization of respiratory measurement system in artificial ventilator for small animal experiments to reduce dead space and its application to lung elasticity evaluation Sensors 21,pp.5123 (Co-authored) 2021
Papers
Catheter sensor system for in-situ breathing and optical imaging measurements at airway in inside of lung Microsystem Technologies 26 (12),pp.3715-3724 (Co-authored) 2020
Papers
Development of micromachined flow sensor for drip infusion system Microsystem Technologies 26 (12),pp.3677-3683 (Co-authored) 2020
Papers
Micro-machined respiratory monitoring system for artificial ventilator in animal experiments Microsystem Technologies 26 (12),pp.3705-3713 (Co-authored) 2020
Papers
Monolithic integration of MEMS thermal flow sensor and its driving circuit onto flexible Cu on polyimide film Microsystem Technologies 26 (9),pp.2839-2846 (Co-authored) 2020
Papers
A micro-machined flow sensor formed on copper on polyimide substrate and its application to respiration measurement Japanese Journal of Applied Physics 58 (SDDL07) (Co-authored) 2019
Papers
Body temperature measurement based on breathing airflow for continuously monitoring patient body condition in disaster Microsystem Technologies 25 (2),pp.4313-4321 (Co-authored) 2019
Papers
Energy-less respiration monitoring device based on thermo-sensitive film Microsystem Technologies 26 (5),pp.489-497 (Co-authored) 2019
Papers
Fabrication method with high-density, high-height microneedle using microindentation method for drug delivery system Microsystem Technologies 26 (8),pp.765-773 (Co-authored) 2019
Papers
Analysis of measurement conditions for detecting change in vital signs with catheter flow sensor Journal of Micromechanics and Microengineering 28,pp.105015 (12pp) (Co-authored) 2018
Papers
Catheter type thermal flow sensor with small footprint for measuring breathing function Microsystem Technologies 24 (8),pp.3455-3465 (Co-authored) 2018
Papers
Development of tube flow sensor by using film transfer technology and its application to in-situ breathing and surface image evaluation in airways Microsystem Technologies 24 (8),pp.3417-3424 (Co-authored) 2018
Papers
Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airway Microsystem Technologies 23 (12),pp.5397-5406 (Co-authored) 2017
Papers
Development of implantable catheter flow sensor into inside of bronchi for laboratory animal Microsystem Technologies 23 (1),pp.175-185 (Co-authored) 2017
Papers
Fabrication of flexible thermal MEMS device based on Cu on polyimide substrate and its flow sensor application Microsystem Technologies 23 (3),pp.677-685 (Co-authored) 2017
Papers
Heartbeat signal detection from analysis of airflow in rat airway under different depths of anesthesia conditions IEEE Sensors Journal 17 (14),pp.4369-4377 (Co-authored) 2017
Papers
Respiration and heartbeat signal detection from airflow at airway in rat by catheter flow sensor with tmeparature compensation function Journal of Micromechanics and Microengineering 27 (12) (Co-authored) 2017
Papers
Smooth-surfaced flexible wall shear stress sensor fabricating by film transfer technology Sensors and Actuators A 265,pp.86-93 (Co-authored) 2017
Papers
Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor Microsystem Technologies 23 (8),pp.3547-3558 (Co-authored) 2017
Papers
Design and fabrication of differently shaped pyramids on Si {100} by anisotropic wet etching Microsystem Technologies 22 (12),pp.2801-2809 (Co-authored) 2016
Papers
Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy Microsystem Technologies 22 (6),pp.1181-1188 (Co-authored) 2016
Papers
Effect of temperature and humidity on degradation of single crystal silicon microbeam in micro-resonator Sensors and Materials 28 (2),pp.113-120 (Co-authored) 2016
Papers
Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM Microsystem Technologies 21,pp.661-668 (Co-authored) 2015
Papers
Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer Microsystem Technologies 21,pp.239-246 (Co-authored) 2015
Papers
Catheter flow sensor with temperature compensation for tracheal intubation tube system Sensors and Actuators A,pp.155-160 (Co-authored) 2014
Papers
Droplet-based biochemical assay by magnetic wire manipulation between multiple droplets Microsystem Technologies 20,pp.315-323 (Co-authored) 2014
Papers
Lateral-Deflection-Controlled Friction Force Microscopy Journal of Applied Physics 116,pp.084311 (Co-authored) 2014
Papers
Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method Applied Physics Express 7,pp.057101 (Co-authored) 2014
Papers
Measurement of Wall Shear Stress Fluctuation with the Micro-fabricated Hot-film sensor in a Boundary Layer of a Wall Jet Journal of Japanese Society for Experimental Mechanics 14,pp.s13-s18 (Co-authored) 2014
Papers
Micromachined catheter flow sensor and its applications in breathing measurements in animal experiments Microsystem Technologies 20,pp.505-513 (Co-authored) 2014
Papers
Micromachined pyramidal shaped biodegradable microneedle and its skin penetration capability Microsystem Technologies 20,pp.2239-2245 (Co-authored) 2014
Papers
On the measurement of wall shear stress with a patch-type micro-fabricated hot-film sensor Journal of Fluid Science and Technology 9 (3),pp.1-13 (Co-authored) 2014
Papers
Structural design of polymer-based tactile sensor with table-shaped sensing pad Microelectronic Engineering 127 (5),pp.1-6 (Co-authored) 2014
Papers
A flexible transparent touch panel based on ionic liquid channel IEEE Sensors 13,pp.3490-3495 (Co-authored) 2013
Papers
A MEMS flow sensor applied in a variable-air-volume air-conditioning system unit in a building Sensors and Actuators A 189,pp.212-217 (Co-authored) 2013
Papers
A Table-shaped tactile sensor for detecting triaxial force on the basis of strain distribution Sensors 13,pp.16347-16359 (Co-authored) 2013
Papers
Design principle of micromechanical probe with an electrostatic actuator for friction force microscopy Microsystem Technologies 19,pp.1567-1572 (Co-authored) 2013
Papers
Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems Appied Physics Letters 103-181901 (Co-authored) 2013
Papers
Measurement of Wall Shear Stress by Using Micro-fabricated Hot-film and Floating-element Sensors Journal of the Japanese Society for Experimental Mechanicas 13,pp.s1-s6 (Co-authored) 2013
Papers
Mechanical strengthening of Si cantilevers by chemical wet etching Microsystem Technologies 19,pp.547-553 (Co-authored) 2013
Papers
An electrostatic actuator for dual-axis micro-mechanical probe on friction force microscope Sensors and Actuators A 175,pp.94-100 (Co-authored) 2012
Papers
Flexible flow sensor for large scale air-conditioning network systems Sensors and Actuators A 188,pp.2-8 (Co-authored) 2012
Papers
Laser Ablation Propulsion Performance of Surface-Modified Polyacetal Journal of Propulsion and Power 28,pp.840-847 (Co-authored) 2012
Papers
Measured viscous and dry friction forces in nanometer-thick lubricant film by friction force Microscopy with Micromechanical Probe TRIBOLOGY LETTERS 48,pp.201-208 (Co-authored) 2012
Papers
Droplet introduction into pen-shaped portable reaction system by gravity and interfacial forces Micro & Nano Letters 6,pp.253-256 (Co-authored) 2011
Papers
Fabrication of a pen-shaped portable biochemical reaction system based on magnetic bead manipulation Journal of Micromechnics and Microengineering 21-067006 (7pp) (Co-authored) 2011
Papers
Fabrication of novel microstructures based on orientation dependent adsorption of surfactant molecules in TMAH solution Journal of Micromechnics and Microengineering 21-015008 (11pp) (Co-authored) 2011
Papers
Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement Biomedical Microdevices 12,pp.247-252 (Co-authored) 2010
Papers
Characteristics of an optimized catheter-type thermal flow sensor for measuring reciprocating airflows in bronchial pathways Journal of Micromechnics and Microengineering 20-125030 (11pp) (Co-authored) 2010
Papers
Droplet-based gene expression analysis using a device with magnetic force-based-droplet-handling system J. Bioscience and Bioengineering 109,pp.193-197 (Co-authored) 2010
Papers
Fabric tactile sensor composed of ball-shaped umbonal fiber for detcting normal and lateral force Micro & Nano Letters 5,pp.211-214 (Co-authored) 2010
Papers
Fabrication of a Stent-type Thermal Flow Sensor for Measuring Nasal Respiration Journal of Micromechnics and Microengineering 20-055029 (8pp) (Co-authored) 2010
Papers
Fabrication of monolithically integrated flow sensor on tube Sensors and Actuators A 163,pp.61-67 (Co-authored) 2010
Papers
Large-sized fabric tactile sensor for detecting contacted object Micro & Nano Letters 5,pp.389-392 (Co-authored) 2010
Papers
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy Tribology Online 5,pp.144-149 (Co-authored) 2010
Papers
Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining Journal of Micromechnics and Microengineering 20-065008 (9pp) (Co-authored) 2010
Papers
The mechanism of selective corrugation removal by KOH anisotropic wet etching Journal of Micromechnics and Microengineering 20-015038 (9pp) (Co-authored) 2010
Papers
A Catheter-type Flow Sensor for Measurement of Aspirated- and Inspired-air Characteristics in Bronchial Region Journal of Micromechnics and Microengineering 19-105027 (9pp) (Co-authored) 2009
Papers
Agitation of Magnetic Beads by Multi-layered Flat Coils Sensors and Actuators: B 137,pp.774-780 (Co-authored) 2009
Papers
Development of self vibration/detection AFM probe using quartz tuning fork IEEJ Transactions on Electrical and Electronic Engineering 4,pp.378-385 (Co-authored) 2009
Papers
Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH Sensors and Actuators A 156,pp.334-341 (Co-authored) 2009
Papers
Magnetic force-based Lab-on-a-chip for single cell analysis in a droplet ECS Transactions 16,pp.15-20 (Co-authored) 2009
Papers
Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH Sensors and Actuators: A 154,pp.192-203 (Co-authored) 2009
Papers
A Palmtop-sized Rotary-drive-type Biochemical Analysis System by Magnetic Beads Handling Journal of Micromechnics and Microengineering 18-035034 (8pp) (Co-authored) 2008
Papers
Cell culture arrays using magnetic force-based cell patterning for dynamic single cell analysis Lab on a Chip 8,pp.134-142 (Co-authored) 2008
Papers
Effect of temperature on fracture toughness in single-crystal-silicon film and transition in its fracture mode Journal of Micromechnics and Microengineering 18-015026 (7pp) (Co-authored) 2008
Papers
Fabrication of a bubble driven arrayed actuator for a tactile display Journal of Micromechnics and Microengineering 18-065012 (9pp) (Co-authored) 2008
Papers
Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber Journal of Micromechnics and Microengineering 18-085014 (8pp) (Co-authored) 2008
Papers
Fabrication of Quartz Tuning-Fork probe with Sharp Tip for AFM Systems Sensors and Actuators: A 148,pp.311-318 (Co-authored) 2008
Papers
Improved sensitivity of dual-axis micro-mechanical probe for friction force microscope Tribology Online 3,pp.356-360 (Co-authored) 2008
Papers
Micromechanical characterization of electroplated permalloy films for MEMS Microsystems Technologies 14,pp.131-134 (Co-authored) 2008
Papers
On-chip Polymerase Chain Reaction Microdevice Employing a Magnetic Droplet-Manipulation System Sensors & Actuators: B 130,pp.583-588 (Co-authored) 2008
Papers
Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching ECS Transactions 16,pp.133-140 (Co-authored) 2008
Papers
Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition Sensors & Actuators: A 138,pp.87-96 (Co-authored) 2007
Papers
Effect of magnesium in KOH solution on the anisotropic wet etching of silicon Sensors & Actuators: A 134,pp.465-470 (Co-authored) 2007
Papers
Experimental and theoretical study of an on-wall in-tube flexible thermal sensor Journal of Micromechnics and Microengineering 17,pp.679-686 (Co-authored) 2007
Papers
Fabrication of densely arrayed Si needles with large height for transdermal drug delivery system application IEEJ Transactions on Electrical and Electronic Engineering 2,pp.340-347 (Co-authored) 2007
Papers
Influence of sub-micrometer notches on the fracture of single crystal silicon thin films Fatigue & Fracture of Engineering Materials & Structures 30,pp.1172-1181 (Co-authored) 2007
Papers
Mechanical design and force calibration of dual-axis micro-mechanical probe for friction force microscopy Journal of Applied Physics 101,pp.034308-1-6 (Co-authored) 2007
Papers
Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants Journal of Micromechnics and Microengineering 17,pp.2299-2307 (Co-authored) 2007
Papers
A Force Transmission System based on a Tulip-shaped Electrostatic Clutch for Haptic Display Devices Journal of Micromechnics and Microengineering 16,pp.2673-2683 (Co-authored) 2006
Papers
An active tactile sensor for detecting mechanical characteristics of contacted objects Journal of Micromechnics and Microengineering 16,pp.1625-1632 (Co-authored) 2006
Papers
Characterization of anisotropic wet etching properties of single crystal silicon: Effects of ppb-level of Cu and Pb in KOH solution Sensors & Actuators: A 128,pp.125-131 (Co-authored) 2006
Papers
Development of an enzymatic reaction device using magnetic beads-cluster handling Journal of Micromechnics and Microengineering 16,pp.1875-1883 (Co-authored) 2006
Papers
Dual-axis micro-mechanical probe for independent detection of lateral and vertical forces Applied Physics Letters 89,pp.173120 (Co-authored) 2006
Papers
Fabrication of a Hollow Needle Structure by Dicing, Wet Etching, and Metal Deposition Journal of Micromechnics and Microengineering 16,pp.2230-2239 (Co-authored) 2006
Papers
Fabrication of densely arrayed micro-needles with flow channels by mechanical dicing and anisotropic wet etching Journal of Micromechnics and Microengineering 16,pp.1740-1747 (Co-authored) 2006
Papers
Improvement in smoothness of anisotropically etched silicon surface: Effects of surfactant and TMAH concentration Sensors & Actuators: A 125,pp.415-421 (Co-authored) 2006
Papers
Mechanical properties of a micron-sized SCS film in a high-temperature environment Journal of Micromechnics and Microengineering 16,pp.715-720 (Co-authored) 2006
Papers
Proposal of pumpless, valveless, and flowless miniaturized reactor using magnetic beads for the portable analysis device Journal of Chemical Engineering of Japan 39,pp.1296-1299 (Co-authored) 2006
Papers
Using Wettability and Interfacial Tension to Handle Droplets of Magnetic Beads in a Micro-Chemical-Analysis System Sensors & Actuators: B 113,pp.563-569 (Co-authored) 2006
Papers
Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition Sensors & Actuators: A 117,pp.143-150 (Co-authored) 2005
Papers
Anisotropy of Fracture Strength and Fracture Toughness of Micro-sized Single-crystal Silicon The Transactions of The Institute of Electrical Engineers of Japan 125,pp.307-312 (Co-authored) 2005
Papers
Characterization of orientation-dependent etching properties of quartz: Application to 3-D micromachining simulation system Sensors & Materials 17,pp.179-186 (Co-authored) 2005
Papers
Fracture toughness measurement of thin-film silicon Fatigue & Fracture of Engineering Materials & Structures 28,pp.687-694 (Co-authored) 2005
Papers
Measurement for fracture toughness of single crystal silicon film with tensile test Sensors & Actuators: A 119,pp.229-235 (Co-authored) 2005
Papers
Polyimide film micromachining by wet-etching technology The Transactions of The Institute of Electrical Engineers of Japan 125,pp.27-36 (Co-authored) 2005
Papers
Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications Journal of Micromechnics and Microengineering 15,pp.282-289 (Co-authored) 2005
Papers
A micromachined active tactile sensor for hardness detection Sensors & Actuators: A 114,pp.141-146 (Co-authored) 2004
Papers
Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution Sensors & Actuators: A 114,pp.516-520 (Co-authored) 2004
Papers
Non-Photolithographic Pattern Transfer for Fabricating Arrayed 3-D Microstructures by Chemical Anisotropic Etching Sensors & Actuators: A 116,pp.264-271 (Co-authored) 2004
Papers
Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures Journal of Micromechnics and Microengineering 14,pp.1462-1467 (Co-authored) 2004
Papers
Three-dimensional interconnect technology on a flexible polyimide film Journal of Micromechnics and Microengineering 14,pp.38-48 (Co-authored) 2004
Papers
Through-wafer interconnection technology for silicon Journal of Micromechnics and Microengineering 14,pp.1029-1036 (Co-authored) 2004
Papers
Difference in activated atomic steps on (111) silicon surface during KOH and TMAH etching Sensors & Materials 15,pp.93-99 (Co-authored) 2003
Papers
Effect of ppb-level metal impurities in KOH solution on the etching of Si {110} and {100} Sensors & Materials 15,pp.43-51 (Co-authored) 2003
Papers
Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon Sensors & Materials 15,pp.21-35 (Co-authored) 2003
Papers
A model explaining mask-corner undercut phenomena in anisotropic silicon etching: A saddle point in the etching-rate diagram Sensors & Actuators: A 97-98,pp.758-763 (Co-authored) 2002
Papers
Active tactile sensor for detecting contact force and hardness of an object Sensors & Actuators: A 103,pp.213-218 (Co-authored) 2002
Papers
Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors Sensors & Actuators: A 100,pp.114-122 (Co-authored) 2002
Papers
Tensile testing system for sub-micrometer thick films Sensors & Actuators: A 97-98,pp.492-496 (Co-authored) 2002
Papers
Change in orientation-dependent etching properties of single-crystal silicon caused by a surfactant added to TMAH solution Sensors and Materials 13,pp.285-291 (Co-authored) 2001
Papers
Micro-morphology of single crystalline silicon surface during anisotropic wet chemical etching in KOH: velocity source forests Sensors & Actuators: A 93,pp.219-231 (Co-authored) 2001
Papers
Micro-morphology of single crystalline silicon surface during anisotropic wet in KOH and TMAH Sensors & Actuators: A 93,pp.232-242 (Co-authored) 2001
Papers
Microfabricated silicon dioxide cantilever with subwavelength aperture Journal of Microscopy 202,pp.12-15 (Co-authored) 2001
Papers
Patterning of polyamide and metal in deep trench Sensors & Actuators: A 92,pp.208-213 (Co-authored) 2001
Papers
Surface roughness of single-crystal silicon etched by TMAH solution Sensors & Actuators: A 90,pp.223-231 (Co-authored) 2001
Papers
Tensile-mode fatigue testing of silicon film as structural materials for MEMS Sensors & Actuators: A 93,pp.70-75 (Co-authored) 2001
Papers
Development of an orientation-dependent anisotropic etching simulation system MICROCAD Electronics and Communications in Japan 83,pp.13-22 (Co-authored) 2000
Papers
Differences in anisotropic etching properties of KOH and TMAH Sensors & Actuators: A 80,pp.179-188 (Co-authored) 2000
Papers
Surface morphology of anisotropically etched single-crystal silicon Journal of Micromechnics and Microengineering 10,pp.522-527 (Co-authored) 2000
Papers
Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip Sensors & Actuators: A 82,pp.291-296 (Co-authored) 2000
Papers
Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation Sensors & Actuators: A 73,pp.131-137 (Co-authored) 1999
Papers
Roughening of single-crystal silicon surface etched by KOH water solution Sensors & Actuators: A 73,pp.122-130 (Co-authored) 1999
Papers
Characterization of orientation dependent etching properties of single-crystal silicon: Effect of KOH concentration Sensors & Actuators: A 64,pp.87-93 (Co-authored) 1998
Papers
Tensile-testing of silicon film having different crystallographic orientations carried out on a silicon chip Sensors & Actuators: A 70,pp.148-152 (Co-authored) 1998
Papers
Fabrication of an S-shaped microactuator IEEE/ASME Journal of Microelectro-mechanical Systems 6,pp.18-24 1997
Papers
Operation of an S-shaped film actuator in liquid environmentconcentration The Transactions of The Institute of Electrical Engineers of Japan 117-E,pp.227-231 (Co-authored) 1997
Papers
An electrostatic gas valve that works in higher than atmospheric gas pressure The Transactions of The Institute of Electrical Engineers of Japan 116-E,pp.219-224 (Co-authored) 1996
Papers
An electrostatically actuated gas valve with an S-shaped film element Journal of Micromechnics and Microengineering 4,pp.205-209 (Co-authored) 1994
Papers
Electrostatically driven gas valve with high conductance IEEE/ASME Journal of Microelectro-mechanical Systems 3,pp.76-80 (Co-authored) 1994
Papers
Orientation and transformation of flagella in electrostatic field IEEE Transactions on Industry Applications 28,pp.1194-1202 (Co-authored) 1992